Multi-target sputtering machine (DC×2+RF×1(selective), max 500 deg.)
Vertical Bridgman furnace
Pt coater
Economical CVD equipment
Resistive thermal evaporation (3 sources)
Floating zone furnace
(transferred from Dept. of Physics, U Tokyo
(laboratories of Prof. Hasegawa and Prof. Uchida))
RF-sputtering machine (3 cathodes; one for magnetic materials)
(transferred from Dept. of Mechano-Informatics, U Tokyo
(laboratory of Prof. Shimoyama))
3-zone furnace
Electric furnaces (box furnaces, tube furnace, vacuum furnace)